The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 08, 2003

Filed:

Aug. 16, 2001
Applicant:
Inventors:

Ido Holcman, Rehovot, IL;

Alexander Shulman, Rehovot, IL;

Jeffrey Danowitz, Tel Aviv, IL;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 2/166 ;
Abstract

A method for determining the orientation of a pattern on the surface of an object relative to the object. The pattern comprises an array of generally perpendicular grid lines intersecting at grid junctions, and the object comprises a marker located at an edge thereof. The method comprises: determining the directions of the grid lines relative to the direction of the reference coordinate system, determining the direction of object's orientation axis relative to the direction of the reference coordinate system, and determining the orientation of the grid lines relative to the object's orientation axis. The step of determining the direction of object's orientation axis comprises the steps of determining a location of the geometrical center of the object in the reference coordinate system and detecting and determining a location of the marker in the reference coordinate system.


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