The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 01, 2003
Filed:
May. 10, 2001
Kevin Lee, Hsin-chu, TW;
Taiwan Semiconductor Manufacturing Co., Ltd, Hsin Chu, TW;
Abstract
A method and an apparatus for cleaning a heater bellow in a chemical vapor deposition chamber by utilizing a plug and a plug base specifically designed for such cleaning are disclosed. The apparatus consists of the plug and the plug base which can be advantageously mounted in a heater bellow for the filling of the bellow with an oxidizing fluid such as H O . After a suitable soaking period of the oxidizing fluid, the fluid is drained away and then deionized water is used to fill the bellow to rinse the bellow wall and to remove the oxidized compound of metal, such as WO . During the soaking process by H O or by deionized water, an inert gas such as argon may be purged through the fluid to improve its uniformity and to improve its interaction with the metal oxide deposition on the bellow wall.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile