The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 25, 2003
Filed:
Nov. 02, 1999
Grant Kenji Larsen, Gloucester, MA (US);
Varian Semiconductor Equipment Associates, Inc., Gloucester, MA (US);
Abstract
An electrostatic device includes a conductive element and a dielectric element having surfaces that are closely-spaced or contacting, a plurality of electrodes positioned adjacent to and electrically isolated from the surface of the dielectric element and a voltage source for applying voltages to the electrodes. Either the conductive element or the dielectric element is flexible. The voltages applied to the electrodes produce a moving wave in the flexible element, wherein a gas between the surfaces is transported in the direction of the moving wave. The device may function as an active electrostatic seal between the surfaces or as an electrostatic vacuum pump.