The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 25, 2003
Filed:
Oct. 12, 2000
Applicant:
Inventors:
Robert John Clifford Mitchell, Pulborough, GB;
Michael T. Wauk, West Sussex, GB;
John Ruffell, Sunnyvale, CA (US);
Hilton Glavish, Incline Village, NV (US);
Peter Kindersley, Horsham, GB;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 3/7304 ;
U.S. Cl.
CPC ...
H01J 3/7304 ;
Abstract
A beam stop ( ) has a charge collecting member ( ) which extends in the direction of scanning of a scanned beam by less than the total distance scanned, so that variation in the charge signal derived from the collecting member can provide a timing signal for use in monitoring alignment of the scanned beam. In a preferred embodiment, the beam stop plate ( ) has slits ( ) leading to apertures ( ) containing charge collecting rods ( ) located within the thickness of the beam stop plate ( ).