The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 28, 2003
Filed:
Aug. 01, 2001
Naomi Matsumura, Hirakatashi, JP;
Masahiko Kowaka, Kobe, JP;
William A. Bagley, San Jose, CA (US);
Akira Terashi, Fuji, JP;
Hideaki Kondo, Kumagaya, JP;
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support and method of fabricating the same are provided. Generally, one method of fabrication includes assembling a subassembly comprising a first reinforcing member and a heating element, supporting the subassembly at least 40mm from a bottom of a mold, encapsulating the supported subassembly with molten aluminum, and applying pressure to the molten aluminum. Alternatively, a method of fabrication includes assembling a subassembly comprising a stud disposed through a heating element sandwiched between a first reinforcing member and a second reinforcing member, supporting the subassembly above a bottom of a mold, encapsulating the subassembly disposed in the mold with molten aluminum to form a casting, forming a hole in the casting by removing at least a portion of the stud, and disposing a plug in at least a portion of the hole.