The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Sep. 13, 2000
Applicant:
Inventors:
Thomas Owen Mitchell, Redwood City, CA (US);
Andreas Berghaus, San Francisco, CA (US);
Assignee:
FEI Company, Hillsboro, OR (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 2/300 ; G21K 7/00 ; G01B 5/28 ;
U.S. Cl.
CPC ...
G01N 2/300 ; G21K 7/00 ; G01B 5/28 ;
Abstract
A probe tip manufactured from a conically shaped quartz tip etched to a fine apex. The quartz tip is coated with about 1 &mgr;m of a hard material such as silicon nitride. A probe tip having dimensions of about 100 nm×1 &mgr;m is then machined from the hard material adjacent to the apex of the quartz tip along the axis of the quartz tip. The machining is preferably performed by focused ion beam milling.