The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Dec. 18, 2000
Cyril Cabral, Jr., Ossining, NY (US);
Roy Arthur Carruthers, Stormville, NY (US);
James McKell Edwin Harper, Yorktown Heights, NY (US);
Chao-Kun Hu, Somers, NY (US);
Kim Yang Lee, Fremont, CA (US);
Ismail Cevdet Noyan, Yorktown Heights, NY (US);
Robert Rosenberg, Cortlandt Manor, NY (US);
Thomas McCarroll Shaw, Peekskill, NY (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
An electrical conductor for use in an electronic structure is disclosed which includes a conductor body that is formed of an alloy including between about 0.001 atomic % and about 2 atomic % of an element selected from the group consisting of Ti, Zr, In, Sn and Hf; and a liner abutting the conductor body which is formed of an alloy that includes Ta, W, Ti, Nb and V. The invention further discloses a liner for use in a semiconductor interconnect that is formed of a material selected from the group consisting of Ti, Hf, In, Sn, Zr and alloys thereof, TiCu , Ta Ti , Ta , Hf , Ta , In , Ta Sn , Ta Zr .