The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 07, 2003
Filed:
Jun. 29, 2000
Arnold Kholodenko, San Francisco, CA (US);
Vijay Parkhe, Sunnyvale, CA (US);
Shamouil Shamouilian, San Jose, CA (US);
You Wang, Cupertino, CA (US);
Wing L. Cheng, Sunnyvale, CA (US);
Alexander M. Veytser, Mountain View, CA (US);
Applied Materials Inc., Santa Clara, CA (US);
Abstract
A substrate support comprises first, second and third sections connected to one another by first and second bonds , one of the sections comprises a surface adapted to receive a substrate . The first bond comprises a first bonding material and the second bond comprises a second bonding material. In one version, the first bonding material is capable of bonding surfaces when heated to a first temperature and the second bonding material is capable of bonding surfaces when heated to a second temperature.