The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 31, 2002
Filed:
Aug. 24, 2000
Other;
Abstract
A surface profile measuring apparatus for measuring rugged profiles of object surfaces includes a white light source, a varying device for varying a relative distance between an object surface and a reference surface, a frequency band limiting device for limiting the frequency band of white light to a particular frequency band, an image pickup device for picking up an image of the object surface, a sampling device for successively acquiring intensity values of interference light corresponding to varying interference fringes, from a particular location at sampling intervals corresponding to a bandwidth of the particular frequency band, a storage device for storing a group of interference light intensity values acquired, and a computing device for estimating characteristic functions from the group of interference light intensity values stored, and determining a height in the particular location based on a peak position of the characteristic functions.