The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 03, 2002
Filed:
Oct. 23, 2001
Hiroki Oka, Kofu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A gate valve ( ) for a semiconductor processing system includes a base frame ( ) configured movable along a guide ( ) to move toward and away from a valve seat ( ), which surrounds an opening portion ( ). A first stopper ( ) is disposed at the upper end of the guide ( ), for defining the movement limit of the base frame ( ) on the valve seat ( ) side. A swing frame ( ) is rotatably attached to the base frame ( ), and has an upper end connected to a valve plug ( ). The swing frame ( ) is connected to the base frame ( ) by a link mechanism ( ), which can bend and stretch while flexing an intermediate portion, and by a spring and damper member ( ). The intermediate portion of the link mechanism ( ) has a mediation member ( ) connected to a reciprocation rod ( ) of an air actuator ( ).