The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 12, 2002
Filed:
Jan. 16, 2001
Applicant:
Inventors:
James Patrick Collins, Shelburne, VT (US);
Laird Chandler MacDowell, Jeffersonville, VT (US);
Wayne Martin Moreau, Wappinger, NY (US);
Michael Santarelli, Allentown, PA (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 7/00 ; G01N 3/300 ; G01N 3/100 ; G01N 2/700 ; G01N 2/100 ;
U.S. Cl.
CPC ...
G01N 7/00 ; G01N 3/300 ; G01N 3/100 ; G01N 2/700 ; G01N 2/100 ;
Abstract
Detection of an evolving or diffusing gaseous substance emanating from an irradiated or thermolyzed layer of polymeric composition in semiconductor processing or similar processes is disclosed. The evolving or diffusing gaseous substance is detected by spatially disposing from the irradiated or thermolyzed layer a detector layer that includes a compound having leaving groups that are sensitive to the gaseous substance being detected.