The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 05, 2002
Filed:
Sep. 01, 2000
Applicant:
Inventors:
Eric R. Harrington, Ipswich, MA (US);
Victor M. Benveniste, Gloucester, MA (US);
Michael A. Graf, Cambridge, MA (US);
Robert D. Rathmell, Exeter, NH (US);
Assignee:
Axcelis Technologies, Inc., Beverly, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 3/730 ;
U.S. Cl.
CPC ...
H01J 3/730 ;
Abstract
A system for inhibiting the transport of contaminant particles with an ion beam includes a particle charging system for charging particles within a region through which the ion beam travels. An electric field is generated downstream relative to the charged region so as to urge charged particles away from a direction of travel for the ion beam.