The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 15, 2002
Filed:
Nov. 07, 2000
Applicant:
Inventors:
Norihiko Nomura, Fujisawa, JP;
Nobuharu Noji, Zushi, JP;
Assignee:
Ebara Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F04F 1/100 ;
U.S. Cl.
CPC ...
F04F 1/100 ;
Abstract
A trap apparatus is provided for improving the efficiency of trapping a product or the efficiency of regenerating the trap unit, i.e., the efficiency of removing the product deposited on the trap unit. The trap apparatus is disposed in a discharge path for evacuating a hermetically sealed chamber through a vacuum pump. The trap apparatus comprises a trap unit for depositing thereon a product contained in a discharged gas and removing the product, and the trap unit has a surface which has been subjected to hydrophilization treatment.