The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 01, 2002
Filed:
Nov. 10, 2000
Applicant:
Inventors:
Chi-Long Chung, Hsinchu, TW;
Eddie Chiu, Hsinchu, TW;
Chun-Lin Chen, Hsinchu, TW;
Sheng-Fen Chiu, Hsinchu, TW;
Assignee:
ProMos Technologies Inc., , TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/14763 ;
Abstract
A structure or a process of the via chain is employed to test the misalignment. The structure of the via chain includes a first via chain in the first direction and a second via chain in the second direction. Using the structure having the via chains in two different directions, the misalignment can be easily detected.