The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 24, 2002
Filed:
Nov. 09, 2000
Applicant:
Inventors:
Andrew W. Kulawiec, Fairport, NY (US);
Dag Lindquist, Penfield, NY (US);
James E. Platten, Penfield, NY (US);
Paul G. Dewa, Newark, NY (US);
Assignee:
Tropel Corporation, Fairport, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 1/114 ;
U.S. Cl.
CPC ...
G01B 1/114 ;
Abstract
A moiré interferometer has an illumination system and an imaging system that share a common focusing optic, which preferably takes the form of a concave mirror. Within the illumination system, the common focusing optic collimates light en route to a test surface. Within the imaging system, the common focusing optic telecentrically images a grating pattern appearing on the test surface onto a fringe pattern detector.