The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 17, 2002
Filed:
Apr. 06, 2001
Tadahiro Ohmi, Sendai-shi, Miyagi 980-0813, JP;
Seiichi Iida, Kobe, JP;
Satoshi Kagatsume, Nirasaki, JP;
Jun Hirose, Nirasaki, JP;
Kazuo Fukasawa, Nirasaki, JP;
Hiroshi Koizumi, Nirasaki, JP;
Hideki Nagaoka, Nirasaki, JP;
Tomio Uno, Osaka, JP;
Kouji Nishino, Osaka, JP;
Nobukazu Ikeda, Osaka, JP;
Ryousuke Dohi, Osaka, JP;
Eiji Ideta, Osaka, JP;
Other;
Abstract
A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice—the pressure-type flow controller wherein with the upstream pressure P maintained about two or more times higher than the downstream pressure P , the downstream flow rate Q is calculated by the equation Q =KP (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal Q between the calculated flow rate Q and the set flow rate Q .