The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 03, 2002
Filed:
Aug. 25, 2000
Akella V. S. Satya, Milpitas, CA (US);
Brian C. Leslie, Cupertino, CA (US);
Gustavo A. Pinto, Belmont, CA (US);
Robert Thomas Long, Santa Cruz, CA (US);
Neil Richardson, Palo Alto, CA (US);
Bin-Ming Benjamin Tsai, Saratoga, CA (US);
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
Disclosed is a method of inspecting a sample. The sample is illuminated with an incident beam, thereby causing voltage contrast within structures present on the sample. Voltage contrast is detected within the structures. Information from the detected voltage contrast is stored, and position data concerning the location of features corresponding to at least a portion of the stored voltage contrast information is also stored. In a specific embodiment, the features represent electrical defects present on the sample. In another embodiment, the stored position data is in the form of a two dimensional map. In another aspect, the sample is re-inspected and the stored position data is used in analyzing data resulting from the re-inspection.