The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 03, 2002

Filed:

May. 17, 2000
Applicant:
Inventor:

Masayuki Kuribara, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/1305 ;
U.S. Cl.
CPC ...
G01R 3/1305 ;
Abstract

An electron beam tester, recording medium and a signal data detecting method capable of detecting whether or not the signal at a predetermined position of an electric component contains a jitter. The electron beam tester includes: a drive circuit which supplies a signal to the electric component; an electron gun which causes to emanate a secondary electron from the electric component by irradiating the electron beam to the electric component; a detector which detects an amount of the secondary electron emanated from the electric component; a first variation detecting unit which detects first variation data indicative of a magnitude of a variation amount of the secondary electron, with a voltage of the secondary electron being constant; a second variation detecting unit which detects second variation data, with a voltage fluctuation of the signal being indeterminate; and a voltage fluctuating data detecting unit which detects voltage fluctuating data indicative of a magnitude of voltage fluctuation when the voltage fluctuation of the signal is indeterminate.


Find Patent Forward Citations

Kuribara, Masayuki. (2002). Electron beam tester, recording medium therefor and signal data detecting method (U.S. Patent No. 6445197). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6445197

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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