The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 27, 2002
Filed:
May. 20, 1998
Shamouil Shamouilian, San Jose, CA (US);
Ananda H. Kumar, Fremont, CA (US);
Kadthala R. Narendrnath, San Jose, CA (US);
Eric Farahmand E Askarinam, Sunnyvale, CA (US);
Edwin C. Weldon, Los Gatos, CA (US);
Michael Rice, Pleasanton, CA (US);
Kenneth S. Collins, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A temperature control system is used to control the temperature of a process chamber during processing of a semiconductor substrate The temperature control system comprises a heat exchanger plate for removing heat from the chamber and a heat transfer member for conducting heat to the heat exchanger plate The heat transfer member comprises a lower heat conduction surface bonded to an external surface of the chamber and an upper heat transmitting surface thermally coupled to the heat exchanger plate Preferably, the temperature control assembly comprises a heater for heating the chamber and a computer control system for regulating the heat removed by the heat exchanger plate as well as the heat supplied by the heater to maintain the chamber at substantially uniform temperatures.