The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2002
Filed:
Nov. 30, 2001
John M. Grant, Austin, TX (US);
Olubunmi O. Adetutu, Austin, TX (US);
Yolanda S. Musgrove, Pflugerville, TX (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A metal gate structure is formed by depositing a gate dielectric, a gate electrode, a stop layer, and a metal layer within a gate trench and removing the portions of the layers that lie outside the gate trench. A first polish or etch process is used to remove a portion of the metal layer selective to the stop layer. A second polish or etch process is used to remove portions of the gate dielectric, the gate electrode, the stop layer and the metal layer which lie outside the gate trench after the first polish or etch process. The resulting structure increases the uniformity and non-planarity of the top surface of the metal gate structure.