The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Dec. 13, 2000
Applicant:
Inventors:
Arne W. Ballantine, Cold Spring, NY (US);
Jeffrey S. Brown, Middlesex, VT (US);
Jeffrey D. Gilbert, South Burlington, VT (US);
James J. Quinlivan, Essex Junction, VT (US);
James A. Slinkman, Montpelier, VT (US);
Anthony C. Speranza, Essex Junction, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/176 ; H01L 2/131 ;
U.S. Cl.
CPC ...
H01L 2/176 ; H01L 2/131 ;
Abstract
A structure comprising a trench having a liner with rounded corners in the top and bottom of the trench is obtained by rapid thermal oxidation.