The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 09, 2002
Filed:
Jun. 29, 2000
Applicant:
Inventors:
Panayotis Andricacos, Croton-on-Hudson, NY (US);
Steven H. Boettcher, Fishkill, NY (US);
Fenton Read McFeely, Ossining, NY (US);
Milan Paunovic, Port Washington, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 5/12 ; B05D 7/22 ; B05D 1/18 ;
U.S. Cl.
CPC ...
B05D 5/12 ; B05D 7/22 ; B05D 1/18 ;
Abstract
Copper is deposited onto a barrier layer such as tungsten from an electroless copper plating bath having a pH of at least 12.89 and a deposition rate of 50 nanometers/minute or less.