The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 02, 2002
Filed:
Jan. 12, 2000
Applicant:
Inventors:
Kay Zimmerman, Göttingen, DE;
Ulrich Rebhan, Göttingen, DE;
Assignee:
Lambda Physik AG, Goettingen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H02H 3/00 ;
U.S. Cl.
CPC ...
H02H 3/00 ;
Abstract
A ventilation system for industrial laser systems is disclosed which can minimize the cooling air intake required during normal operation. Adequate ventilation is maintained even if the housing is opened. Various sensors monitor the condition of the cooling air and can increase the air intake if required for cooling or safety. Such a ventilation system is of particular advantage for excimer lasers in microlithography applications because the consumption of conditioned clean room air is controlled by the actual needs of the laser device.