The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 04, 2002

Filed:

Mar. 06, 2001
Applicant:
Inventors:

Ting-Chang Chang, Hsin-Chu, TW;

Ching-Wei Chen, Taipei, TW;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/904 ;
U.S. Cl.
CPC ...
H01L 2/904 ;
Abstract

A structure for forming thin film transistor with reduced metal impurities. The structure at least includes the following steps. First of all, an insulation substrate. Then, an insulating gettering layer on the insulation substrate, wherein the amorphous silicon layer defines an active area, and a channel region on the insulating gettering layer, a source region on the insulating gettering layer adjacent to the channel region, a drain region on the insulating gettering layer adjacent to the channel region and opposite to the source region, and a gate on the channel region, wherein the source, drain, insulating gettering layer and channel region are components of a transistor.


Find Patent Forward Citations

Loading…