The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 21, 2002
Filed:
Jan. 15, 1999
Akihiro Fujimoto, Kumamoto-ken, JP;
Kazuo Sakamoto, Kumamoto, JP;
Nobukazu Ishizaka, Kumamoto, JP;
Izumi Hasegawa, Kumamoto-ken, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
To provide a coating apparatus which is capable of making short a lag time up to action of a valve and making operate a discharging pump and a valve with the best timing. By employing electric-air regulators ER and ER of small size and high response speed as a speed controller for controlling a switching speed of a switching valve AV or a suck-back valve SV, total flowing course is made short, thereby a time lag up to operation of a valve is made short. Further, by detecting the pressure of a resist liquid being discharged from a discharging pump by a pressure sensor and by controlling the operation of each device of a discharging pump a switching valve AV, and a suck-back valve SV through a controller a discharging pump a switching valve AV, and a suck-back valve SV can be operated with the best timings, and generation of particles due to dripping of a resist liquid at a tip end of a resist nozzle is prevented from occurring.