The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 14, 2002
Filed:
Nov. 15, 2000
Applicant:
Inventors:
Bruce W. Smith, Webster, NY (US);
John S. Petersen, Austin, TX (US);
Assignee:
ASM Lithography B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/742 ; G03B 2/752 ; G03F 9/00 ; G03L 5/00 ; A61N 5/00 ;
U.S. Cl.
CPC ...
G03B 2/742 ; G03B 2/752 ; G03F 9/00 ; G03L 5/00 ; A61N 5/00 ;
Abstract
A projection lithography system provides a cross-quadrupole illumination pattern in combination with a translucent substrate having boundary relief features. The features are spaced close together so that they are not imaged in a focal plane, but generate a dark image of the space between the features in the focal plane.