The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 07, 2002
Filed:
Jun. 08, 1999
Applicant:
Inventors:
Assignee:
Seiko Instruments Inc., , JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 3/126 ; H01L 2/166 ;
U.S. Cl.
CPC ...
H01L 3/126 ; H01L 2/166 ;
Abstract
To provide an SPM probe comprising an SPM probe having a piezoresistor and enable to measure surface voltage of a sample. An SPM probe forming a piezoresistor has conductivity covering metal film on a tip surface , and conductive layer is wired from the metal film so as to be one side of an electrode. By that, it is possible to measure interaction between the sample surface by detecting bending quantity of the SPM probe by the piezoresistor and the tip, and to measure voltage of the sample surface without using a detector needing complicated adjustment.