The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2002
Filed:
Dec. 28, 1999
Alexander I. Ershov, San Diego, CA (US);
Eckehard D. Onkels, San Diego, CA (US);
Palash P. Das, Vista, CA (US);
William N. Partlo, Poway, CA (US);
Thomas Hofmann, San Diego, CA (US);
Cymer, Inc., San Diego, CA (US);
Abstract
A tunable injection seeded very narrow band F lithography laser. The laser combines modular design features of prior art long life reliable lithography lasers with special techniques to produce a seed beam operated in a first gain medium which beam is used to stimulate narrow band lasing in a second gain medium to produce a very narrow band laser beam useful for integrated circuit lithography. In a preferred embodiment, two tunable etalon output couplers are used to narrow band an F laser and the output of the seed laser is amplified in an F amplifier.