The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 30, 2002
Filed:
May. 25, 1999
Applicant:
Inventors:
Wayne A. Branagh, Omaha, NE (US);
Robert C. Fry, Omaha, NE (US);
Juan C. Ivaldi, Foster City, CA (US);
Jason A. Rivers, Omaha, NE (US);
Michael R. Dyas, Omaha, NE (US);
Robert M. Brown, Jr., Western, NE (US);
Assignee:
SD Acquisition Inc., Omaha, NE (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 3/18 ;
U.S. Cl.
CPC ...
G01J 3/18 ;
Abstract
Disclosed is a spectrometer system with unique wavelength resolution improving relative positioning of diffraction grating and detector. Also disclosed is a modified evolving windowed factor analysis based method of detecting semiconductor etch end points which is particularly well suited for use in real time monitoring and process control. Use of wavelength group selecting mask filters is also disclosed.