The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 16, 2002
Filed:
Jul. 16, 1999
Yvon Gris, Tullins, FR;
Germaine Troillard, Le Touvet, FR;
Jocelyne Mourier, Saint Egreve, FR;
Jos Guelen, Crolles, FR;
Geneviève Lunardi, Meylan, FR;
Henri Banvillet, Froges, FR;
Jean-Claude Oberlin, Le Touvet, FR;
Catherine Maddalon, Saint Egreve, FR;
Other;
Abstract
A method of manufacturing a capacitor includes the steps of depositing a first metal level and etching it to leave in place a region corresponding to a first plate of a capacitor and an area of contact with an upper level; depositing an insulating layer; forming a first opening above the first capacitor plate; depositing a thin insulating layer; forming a second opening above the contact area; depositing a second metal level; removing by physico-chemical etching the second metal layer outside regions where it fills up the openings; and depositing a third metal level and leaving in place portions thereof.