The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
May. 09, 2000
Applicant:
Inventors:
Assignee:
Macronix International Co., Ltd., Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 9/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ;
Abstract
Conventionally, efforts to improve the yield of chips produced on a wafer focused on defect reduction. Another approach is optimizing wafer exposure patterns. The present invention includes a computer-based procedure and apparatus to expose cells on the surface of a wafer so as to maximize the number of dies produced from a wafer. The invention is useful in the exposure of six and eight inch wafers, as well as larger wafers.