The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 09, 2002
Filed:
Feb. 14, 2000
Norihiko Nomura, Tokyo, JP;
Nobuharu Noji, Tokyo, JP;
Ebara Corporation, Tokyo, JP;
Abstract
The present invention provides a trap apparatus which is capable of increasing the trapping efficiency while fulfilling a conductance allowed by a vacuum chamber in a depositing process or the like, for thereby increasing the service life of a vacuum pump and protecting a toxic substance removing device for increased operation reliability, and reducing equipment and running costs. The trap apparatus has a trap unit ( ) disposed in a discharge passage ( ) for discharging therethrough a gas from a vacuum chamber ( ) with a vacuum pump ( ) for trapping and removing a product in a discharged gas. The trap unit ( ) has trap passages comprising an upstream passage portion ( ) spreading outwardly from the center and a downstream passage portion ( ) directed inwardly toward the center.