The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 26, 2002

Filed:

Dec. 14, 1999
Applicant:
Inventors:

Heon Lee, Sunnyvale, CA (US);

Young-Jin Park, Poughkeepsie, NY (US);

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/1338 ; H01L 2/18238 ; H01L 2/128 ; H01L 2/144 ;
U.S. Cl.
CPC ...
H01L 2/1338 ; H01L 2/18238 ; H01L 2/128 ; H01L 2/144 ;
Abstract

A method for forming a transistor is formed where a gate electrode of the transistor is formed over a substrate defining a gate channel portion of the substrate. A mask is also formed over the substrate, a portion of the mask extending over a first portion of the substrate adjacent to the gate channel portion of the substrate. The mask defines a second portion of the substrate adjacent to the first portion of the substrate. An ion beam is directed toward the substrate to form a drain or a source region of said transistor adjacent to the gate channel portion of the substrate, the source or drain region including the first and second portions of the substrate. The ion beam implants the second portion of the substrate with a first implantation characteristic. The ion beam passes through the extended portion of the mask to reach the first portion to implant the first portion with a second implantation characteristic, such second implantation characteristic being different from the first implantation characteristic.


Find Patent Forward Citations

Lee, Heon. (2002). Self-aligned ldd formation with one-step implantation for transistor formation (U.S. Patent No. 6362033). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6362033

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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