The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2002
Filed:
Nov. 09, 1999
Applicant:
Inventors:
Koji Yamakawa, Kawasaki, JP;
Osamu Arisumi, Yokohama, JP;
Katsuhiko Hieda, Yokohama, JP;
Tsunetoshi Arikado, Tokyo, JP;
Hideyuki Kanai, Kawasaki, JP;
Assignee:
Kabushiki Kaisha Toshiba, Kawaski, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01C 2/994 ;
U.S. Cl.
CPC ...
H01C 2/994 ;
Abstract
A semiconductor device comprises a semiconductor substrate and a capacitor provided above the semiconductor substrate and having an upper electrode, a lower electrode, and a dielectric film provided between the upper electrode and the lower electrode. At least one of the electrodes comprises an SrRuO film provided near the dielectric film and a conductive film made of conductive material other than SrRuO and provided far from the dielectric film.