The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2002
Filed:
Jul. 14, 1998
Applicant:
Inventors:
Assignee:
Nippon Sanso Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G06F 1/900 ;
U.S. Cl.
CPC ...
G06F 1/900 ;
Abstract
The present invention uses a transportation robot furnished with a storage chamber that can store substrate wafers S under an inert gas atmosphere, and when transporting substrate wafers S between transportation chambers installed on processing apparatus and holding an inert gas atmosphere, connection chamber is disposed between storage chamber and transportation chamber when placing and removing substrate wafers S between storage chamber of transportation robot and the transportation chamber of processing apparatus , and after introducing inert gas into the connection chamber at low pressure, opening the gate valves GV and GV between storage chamber and transportation chamber
Published as:
WO9824123A1; JPH10163288A; EP0889515A1; TW355176B; KR19990081918A; KR100295983B1; US6343239B1; EP0889515A4; EP0889515B1; DE69736224D1; JP3901265B2; DE69736224T2;