The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2002
Filed:
Mar. 08, 2000
Tokyo Electron Limited, Tokyo, JP;
Abstract
A cleaning apparatus and a cleaning method for cleaning an object are provided. In the cleaning apparatus, a drying chamber and a cleaning bath are separated from each other up and down, respectively. Thus, a space in the drying chamber can be insulated from a space of the cleaning bath through rotary doors and a slide door . In the cleaning method, a cleaning process in the cleaning bath is carried out while sealing it by the rotary doors . On the other hand, a drying process in the drying chamber is accomplished while sealing and closing it by the slide door . Consequently, there is no possibility that, during the drying process, the object is subjected to a bad influence from a chemical treatment.