The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 01, 2002
Filed:
Apr. 22, 1999
David Paul Agnello, Wappingers Falls, NY (US);
Mary Conroy Bushey, South Burlington, VT (US);
Donna K. Johnson, Underhill, VT (US);
Jerome Brett Lasky, Essex Junction, VT (US);
Peter James Lindgren, Burlington, VT (US);
Kirk David Peterson, Essex Junction, VT (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A method for removing a formation of oxide of titanium that is generated as a byproduct of a process that forms cobalt disilicide within an insulated-gate field effect transistor (FET). The method applies a chemical reagent to the FET at a predetermined temperature, and for a predetermined period of time, necessary for removing the formation, wherein the reagent does not chemically react with the cobalt disilicide. A reagent that accomplishes this task comprises water (H O), ammonium hydroxide (NH OH), and hydrogen peroxide (H O ), wherein the NH OH and the H O each comprise approximately 4% of the total reagent volume. An effective temperature is 65° C. combined with a 3 minute period of application.