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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6334097 B1

PDFFull Text
Date of Patent:
Dec. 25, 2001

Filed:

Jan. 06, 1999

Method of determining lethality of defects in circuit pattern inspection method of selecting defects to be reviewed and inspection system of circuit patterns involved with the methods

Applicant:
Inventors:

Yasuhiro Yoshitake, Yokosuka, JP;

Masataka Shiba, Yokohama, JP;

Atsushi Shimoda, Hiratsuka, JP;

Assignee:

Hitachi, Ltd., Tokyo, JP;

Attorney:
Primary Examiner:

Marc S Hoff

Assistant Examiner:

Edward Raymond

Int. Cl.
CPC ...
G06F 1/132 ;
U.S. Cl.
CPC ...
G06F 1/132 ;

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Yoshitake, Yasuhiro. (2001). Method of determining lethality of defects in circuit pattern inspection method of selecting defects to be reviewed and inspection system of circuit patterns involved with the methods (U.S. Patent No. 6334097). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6334097

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