The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2001
Filed:
Nov. 12, 1999
Applicant:
Inventors:
Rüdiger Schmolke, Burghausen, DE;
Dieter Gräf, Burghausen, DE;
Robert Kerschreiter, Kirchdorf, DE;
Hans-Adolf Gerber, Burghausen, DE;
Anton Luger, Wittibreut, DE;
Monique Suhren, Portland, OR (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 1/10 ;
U.S. Cl.
CPC ...
G01J 1/10 ;
Abstract
The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.