The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2001
Filed:
Oct. 27, 1999
Applicant:
Inventors:
Jeffrey S. McMullin, Portland, OR (US);
James M. Hannan, Portland, OR (US);
Assignee:
Credence Systems Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 3/102 ;
U.S. Cl.
CPC ...
G01R 3/102 ;
Abstract
A load board is attached to the test head of a semiconductor tester and has a receptacle surface oriented substantially perpendicular to a Z-axis and presented toward a handler location. An adaptor plate is attached to a Z axis abutment structure and has a surface at a predetermined Z axis position relative to the receptacle surface of the load board, the surface of the adaptor plate being presented toward the handler location. At least three spacers are attached to the adaptor plate and project from the surface of the adaptor plate.