The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2001
Filed:
Dec. 29, 1999
Yutaka Akaike, Nishiyatsushiro-gun, JP;
Isao Kono, Higashiyamanashi-gun, JP;
Satoshi Sano, Yamanashi, JP;
Tokyo Electron Limited, , JP;
Abstract
An aligner (,) according to the present invention is an apparatus in which a wafer chuck (,), wafer (W), and contactor (,) are aligned with one another, and these three elements are then united to form a shell (S), and the shell (S) is reduced to the three elements. A identification code (,) is attached to the contactor (,). A reader (,) reads the identification code (,). The identification code (,) read by means of the reader (,) is associated with the position of the main chuck (,) reached when first and second valve mechanisms (,) are connected, and is loaded into a control device (,). When the shell (S) is disassembled, the position of the main chuck (,) is retrieved in the control device (,) in accordance with the identification code (,) read by means of the reader (,). The main chuck (,) is moved according to the result of the retrieval.