The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2001
Filed:
Apr. 25, 2000
Thomas P. Glenn, Gilbert, AZ (US);
Steven Webster, Chandler, AZ (US);
Gary L. Swiss, Gilbert, AZ (US);
Amkor Technology, Inc., Chandler, AZ (US);
Abstract
A method includes identifying and determining a position of a scribe grid on a front-side surface of a wafer with a camera. Based on this information, a laser is fired to form an alignment mark on the back-side surface of the wafer. Advantageously, the alignment mark is positioned with respect to the scribe grid to within tight tolerance. The wafer is then cut from the backside surface using the alignment mark as a reference. Of importance, the wafer is cut from the back-side surface thus protecting the front-side surface of the wafer. Of further importance, the wafer is precisely cut such that the scribe line is not fabricated with the extra large width of scribe lines of conventional wafers designed to be cut from the back-side surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile