The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2001
Filed:
Aug. 07, 2000
Sheng-Hsiung Yang, Hsin-Chu, TW;
Abstract
A method for forming high voltage devices compatible with low voltage devices on a semiconductor substrate is provided. A substrate is provided. An oxide layer is formed on the substrate. An N well is formed in the substrate. A P well is formed opposite to the N well in the substrate. A plurality of N-field regions are formed as drift regions in the P well and as isolation regions in the N well. A plurality of P-field regions are formed as drift regions in the N well and as isolation regions in the P well region. A plurality of field oxide regions are formed on the N well and the P well in the substrate. N,type doped regions are formed in the P well through an N-grade implantation, prior to a gate oxide layer and a polysilicon layer formation. An N,type doped region in the N,type doped region is formed as a source/drain region for an NMOS transistor in the P well. A P,type doped region is formed as a source/drain region for a PMOS transistor in the N well. The polysilicon layer is formed and defined as a gate on the gate oxide layer across a channel for the NMOS/PMOS transistor and a portion of the field oxide region adjoining thereto.