The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 23, 2001
Filed:
Dec. 21, 1999
Applicant:
Inventors:
Jun Ozawa, Yamanashi-Ken, JP;
Jun Hirose, Yamanashi-Ken, JP;
Eiji Hirose, Yamanashi-Ken, JP;
Makoto Ohara, Urayasu, JP;
Assignee:
Tokyo Electron Limited, Tokyo-To, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 4/907 ;
U.S. Cl.
CPC ...
B65G 4/907 ;
Abstract
A transfer system,for carrying a wafer W into/out of a process chamber,is provided in a box,defining a load-lock chamber,. The box,is divided into a first chamber,and a second chamber,. A transfer arm,for carrying the wafer W is provided in the first chamber,. A linearly moving system,for linearly moving the transfer arm,is provided in the second chamber,. The internal pressure in the first chamber is set to be higher than the internal pressure in the second chamber.