The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 02, 2001
Filed:
Jul. 02, 1998
Masahito Kobayashi, Yamanashi-ken, JP;
Kazunari Ishii, Kofu, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
With a probe-test method and a prober for examining certain electric characteristics of an object of examination, a main chuck is adapted to be driven to move in the X-, Y-, Z- and &thgr;-directions in order to bring the object into contact with the probes of the prober and then the shaft of the support of the main chuck is warped under the contact pressure applied by the probes to tilt the main chuck. The position where each of the probes contacts the corresponding one of the electrodes on the object is displaced (moved) in the X-, Y- and Z-directions by the tilt. The displacement is predicted by an operation. unit and the main chuck is moved in the X-, Y- and Z-directions to correct the displacement.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile