The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 18, 2001
Filed:
Dec. 21, 1999
Kourosh Saadatmand, Merrimac, MA (US);
David R. Swenson, Georgetown, MA (US);
William F. DiVergilio, Beverly, MA (US);
Stephen M. Quinn, Gloucester, MA (US);
Zhimin Wan, San Jose, CA (US);
Victor M. Benveniste, Gloucester, MA (US);
Axchlisrtechnologies, Inc., Beverly, MA (US);
Abstract
An electrostatic quadrupole lens assembly (,) is provided for an ion implanter (,) having an axis (,) along which an ion beam passes, comprising: (i) four electrodes (,) oriented radially outward from the axis (,), approximately 90° apart from each other, such that a first pair of electrodes (,and,) oppose each other approximately 180° apart, and a second pair of electrodes (,and,) also oppose each other approximately 180° apart; (ii) a housing (,) having a mounting surface (,) for mounting the assembly (,) to the implanter, the housing at least partially enclosing the four electrodes (,); (iii) a first electrical lead (,) for providing electrical power to the first pair of electrodes (,and,); (iv) a second electrical lead (,) for providing electrical power to the second pair of electrodes (,and,); and (v) a plurality of electrically insulating members (,) formed of a glass-like material, comprising at least a first electrically insulating member for attaching the first pair of electrodes (,and,) to the housing, and at least a second electrically insulating member for attaching the second pair of electrodes (,and,) to the housing. The plurality of electrically insulating members (,) are preferably comprised of quartz (SiO,), or a heat resistant and chemical resistant glass material such as Pyrex®. The members (,) resist accumulation of material such as graphite sputtered off of the electrodes (,) by the ion beam, thus reducing the occurrence of high voltage breakdown and electrical current breakdown.