The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 04, 2001
Filed:
Mar. 15, 1999
Applicant:
Inventors:
Gerald R. Dietze, Portland, OR (US);
Oleg V. Kononchuk, Vancouver, WA (US);
Assignee:
SEH America, Inc., Vancouver, WA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01G 1/950 ;
U.S. Cl.
CPC ...
G01G 1/950 ;
Abstract
A method of determining the thickness of a layer on a substrate where the layer is deposited during a semiconductor manufacturing process. The substrate is weighed a first time. The layer is deposited on the substrate and the substrate is weighed a second time. The thickness of the layer is calculated using the difference between the second weighing and the first weighing.