The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 04, 2001

Filed:

Aug. 18, 1999
Applicant:
Inventors:

Luis J. Matienzo, Endicott, NY (US);

Kim J. Blackwell, Owego, NY (US);

Frank D. Egitto, Binghamton, NY (US);

Allan R. Knoll, Endicott, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/402 ; C23C 1/420 ; C23C 1/424 ; C23C 1/438 ; B05D 3/06 ;
U.S. Cl.
CPC ...
C23C 1/402 ; C23C 1/420 ; C23C 1/424 ; C23C 1/438 ; B05D 3/06 ;
Abstract

A method for attaching adherent metal components, particularly a copper film, on at least one surface of a polyimide substrate is provided. The method comprises the steps of: exposing at least one surface of the polyimide substrate to a reactive gas plasma that provides a level of ion bombardment of the polyimide surface sufficient to disrupt at least a portion of the imide groups on the surface and to form reactive carboxylate groups, carbonyl groups and other carbon-oxygen functional groups on the surface; and then depositing a metal film onto the chemically-modified surface without intervening exposure to air. The present invention also provides a copper-coated polyimide product comprising a polyimide substrate having a substantially smooth and chemically-modified surface and a copper film directly attached to the surface, i.e., the product is free of a polymeric adhesive layer or tie coat between the surface of the polyimide substrate and the copper film.


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