The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 31, 2001

Filed:

Dec. 12, 1997
Applicant:
Inventors:

Mario Garza, Sunnyvale, CA (US);

John V. Jensen, Fremont, CA (US);

Nicholas K. Eib, San Jose, CA (US);

Keith K. Chao, San Jose, CA (US);

Assignee:

LSI Logic Corporation, Milpitas, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 9/00 ;
U.S. Cl.
CPC ...
G03F 9/00 ;
Abstract

Disclosed is a method for correcting a layout design using a design rule checker. The method includes providing a layout design file having the layout design that is to be corrected for optical proximity by the design rule checker. Providing a run set to the design rule checker. The run set includes a plurality of correction values that are used to correct a plurality of features of the layout design that have a selected space dimension. Identifying each of the plurality of features that have the selected space dimension. The method further includes correcting each of the plurality of features that have the selected space dimension with one correction value of the plurality of correction values of the run set. Preferably, the run set is generated from a correction table that has the plurality of correction values.


Find Patent Forward Citations

Loading…