The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 31, 2001
Filed:
Nov. 15, 1999
Applicant:
Inventors:
Assignee:
Taiwan Semiconductor Manufacturing Company, Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/14763 ;
Abstract
An improved method to form self-aligned contacts with polysilicon plugs is described. A semiconductor substrate is provided. A silicon oxide layer overlying the semiconductor substrate is deposited. A contact hole is etched through the silicon oxide layer to the surface of the semiconductor substrate. A polysilicon layer is deposited overlying the silicon oxide layer and filling completely the contact hole. The polysilicon layer is polished away to define only polysilicon remaining in the contact hole and to remove the silicon oxide layer sufficient to flatten the top surface of the silicon oxide layer. The fabrication of the integrated circuit device is completed.